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Ä«Å×°í¸® Special Linear Stage
Á¦¸ñ ANT-M Series

 

Performance Specifications

 
¡¡ Axis ¡¡ X Axis (Bottom) ¡¡ Y Axis (Upper)
¡¡ Effective Stroke ¡¡ 1,120 mm ¡¡ 360 mm
¡¡ Maximum Velocity ¡¡ 1,200 mm/sec ¡¡ 500 mm/sec
¡¡ Maximum Acceleration ¡¡ 0.3 G ¡¡ 0.3 G
¡¡ Scale Resolution ¡¡ 0.2 um / count ¡¡ 0.2 um / count
¡¡ Position Accuracy ¡¡ ¡¾ 1.0 µm (After Error Mapping) ¡¡ ¡¾ 1.0 µm (After Error Mapping)
¡¡ Position Repeatability ¡¡ ¡¾ 0.5 µm ¡¡ ¡¾ 0.5 µm
¡¡ Straightness (Horizontal)               
 of Effective Stroke
¡¡ ¡¾ 2.5 µm ¡¡ ¡¾ 3 µm
¡¡ Straightness (Vertical)                            
 of Effective Stroke
¡¡ ¡¾ 2.5 µm ¡¡ ¡¾ 3 µm
¡¡ Yawing                                        of Effective Stroke ¡¡ ¡¾ 3 arc-sec ¡¡ ¡¾ 4 arc-sec
¡¡ Pitching                                             of Effective Stroke ¡¡ ¡¾ 3 arc-sec ¡¡ ¡¾ 4 arc-sec
¡¡ orthogonality ¡¡ ¡¾ 3 arc-sec

 

 

 

 
 

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