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카테고리 Special Linear Stage
제목 ANT-M Series

 

Performance Specifications

 
  Axis   X Axis (Bottom)   Y Axis (Upper)
  Effective Stroke   1,120 mm   360 mm
  Maximum Velocity   1,200 mm/sec   500 mm/sec
  Maximum Acceleration   0.3 G   0.3 G
  Scale Resolution   0.2 um / count   0.2 um / count
  Position Accuracy   ± 1.0 µm (After Error Mapping)   ± 1.0 µm (After Error Mapping)
  Position Repeatability   ± 0.5 µm   ± 0.5 µm
  Straightness (Horizontal)               
 of Effective Stroke
  ± 2.5 µm   ± 3 µm
  Straightness (Vertical)                            
 of Effective Stroke
  ± 2.5 µm   ± 3 µm
  Yawing                                        of Effective Stroke   ± 3 arc-sec   ± 4 arc-sec
  Pitching                                             of Effective Stroke   ± 3 arc-sec   ± 4 arc-sec
  orthogonality   ± 3 arc-sec

 

 

 

 
 

장비의 안정성과 정도를 높이기 위해 석정반에 리니어 스테이지를 구성한 정밀 스테이지이다.

Granite BaseX축을 구성하여 안정성을 높였으며, Profile 리니어 스테이지를 Y축으로 구성한 리니어 스테이지이다.

정속 운전과 고속 운전의 정밀한 위치 정밀 제어가 우수하여, 정밀 Vision 검사용 스테이지 구성이 가능하다.


 
 
 

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ANT-G Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Effective Stroke 770 mm 670 mm Maximum Velocity 1,500 mm/sec 1,500 mm/sec Maximum Acceleration 1.5 G 1.5 G Scale Resolutio..
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ANT-G Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Effective Stroke 480 mm 450 mm Maximum Velocity 800 mm/sec 800 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale Resolution ..
카테고리 : Gantry Linear Stage
ANT-G Series
Performance Specifications Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 1,200 mm 630 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale ..
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ANT-G Series
Performance Specifications Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 250 mm 1100 mm Maximum Velocity 1,100 mm/sec 1,100 mm/sec Maximum Acceleration 0.6 G 0.6 G Scale Re..
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Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 920 mm 760 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale ..
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Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Stroke Max. 4,000 mm Max. 1,000 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale Resol..
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ANT-S Series
Performance Specifications Stroke Max. 4,000 mm Maximum Velocity 1,000 mm/sec Maximum Acceleration 0.5 G Scale Resolution 0.1 ~ 1.0 um / count Position Accuracy ± 10 탆 (Non-Error Mappi..
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