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Ä«Å×°í¸® Profile Linear Stage
Á¦¸ñ ANT-G Series

 

Performance Specifications

 

¡¡ Axis ¡¡ X Axis (Bottom) ¡¡ Y Axis (Upper)
¡¡ Effective Stroke ¡¡ 770 mm ¡¡ 670 mm
¡¡ Maximum Velocity ¡¡ 1,500 mm/sec ¡¡ 1,500 mm/sec
¡¡ Maximum Acceleration ¡¡ 1.5 G ¡¡ 1.5 G
¡¡ Scale Resolution ¡¡ 1.0 um / count ¡¡ 1.0 um / count
¡¡ Position Accuracy ¡¡ ¡¾ 3.0 µm (Non-Error Mapping) ¡¡ ¡¾ 3.0 µm (Non-Error Mapping)
¡¡ Position Repeatability ¡¡ ¡¾ 1.0 µm ¡¡ ¡¾ 1.0 µm
¡¡ Straightness (Horizontal)               
of Effective Stroke
¡¡ ¡¾ 3 µm ¡¡ ¡¾ 3 µm
¡¡
 
Straightness (Vertical)                            
of Effective Stroke
¡¡ ¡¾ 3 µm ¡¡ ¡¾ 3 µm
¡¡ Yawing                                       
of Effective Stroke
¡¡ ¡¾ 5 arc-sec ¡¡ ¡¾ 5 arc-sec
¡¡
Pitching                                             of Effective Stroke ¡¡ ¡¾ 5 arc-sec ¡¡ ¡¾ 5 arc-sec
¡¡ orthogonality ¡¡ ¡¾ 5 arc-sec

 

 

 
  

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