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īװ Gantry Linear Stage
ANT-G Series
 

 

Performance Specifications

 

Axis X Axis (Bottom) Y Axis (Upper)
Effective Stroke 480 mm 450 mm
Maximum Velocity 800 mm/sec 800 mm/sec
Maximum Acceleration 0.5 G 0.5 G
Scale Resolution 0.2 um / count 0.2 um / count
Position Accuracy 1.0 µm (After Error Mapping) 1.0 µm (After Error Mapping)
Position Repeatability 0.5 µm 0.5 µm
Straightness (Horizontal)               
of Effective Stroke
2.5 µm 2.5 µm
Straightness (Vertical)                             of Effective Stroke 2.5 µm 2.5 µm
Yawing                                        of Effective Stroke 5 arc-sec 4 arc-sec
Pitching                                             of Effective Stroke 5 arc-sec 4 arc-sec
orthogonality 5 arc-sec

 

 

 
 

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Profile Linear Stage
Gantry Linear Stage
Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke700 mm40 mmMaximum Velocity500 mm/sec500 mm/secMaximum Acceleration0.3 G0.3 GScale Resoluti..
īװ : Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke300 mm x 4500 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale Resol..
īװ : Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke1,120 mm360 mmMaximum Velocity1,200 mm/sec500 mm/secMaximum Acceleration0.3 G0.3 GScale Resolutio..
īװ : Special Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke770 mm670 mmMaximum Velocity1,500 mm/sec1,500 mm/secMaximum Acceleration1.5 G1.5 GScale Resolutio..
īװ : Profile Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke480 mm450 mmMaximum Velocity800 mm/sec800 mm/secMaximum Acceleration0.5 G0.5 GScale Resolution..
īװ : Gantry Linear Stage
ANT-G Series
Performance SpecificationsAxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke1,200 mm630 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale ..
īװ : Profile Linear Stage
ANT-G Series
Performance SpecificationsAxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke250 mm1100 mmMaximum Velocity1,100 mm/sec1,100 mm/secMaximum Acceleration0.6 G0.6 GScale Re..
īװ : Gantry Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke920 mm760 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale ..
īװ : Gantry Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)StrokeMax. 4,000 mmMax. 1,000 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale Resol..
īװ : Profile Linear Stage
ANT-S Series
Performance SpecificationsStrokeMax. 4,000 mmMaximum Velocity1,000 mm/secMaximum Acceleration0.5 GScale Resolution0.1 ~ 1.0 um / countPosition Accuracy 10 m (Non-Error Mappi..
īװ : Profile Linear Stage