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īװ Profile Linear Stage
ANT-G Series

 
 

Performance Specifications

Axis X Axis (Bottom) Y Axis (Upper / Dual)
Effective Stroke 1,200 mm 630 mm
Maximum Velocity 1,000 mm/sec 1,000 mm/sec
Maximum Acceleration 0.5 G 0.5 G
Scale Resolution 0.5 um / count 0.5 um / count
Position Accuracy 1.0 µm (After Error Mapping) 1.0 µm (After Error Mapping)
Position Repeatability 0.5 µm 0.5 µm
Straightness (Horizontal)               
of Effective Stroke
3 µm 3 µm
Straightness (Vertical)                             of Effective Stroke 3 µm 3 µm
Yawing                                        of Effective Stroke 5 arc-sec 4 arc-sec
Pitching                                             of Effective Stroke 5 arc-sec 4 arc-sec
orthogonality 3 arc-sec

 

 

 
 

̱ ݿ Ͼ ̴.

X Y · Ͼ ̴.

ġ  Ͽ, Vision ˻ ϴ.


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Profile Linear Stage
Gantry Linear Stage
Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke700 mm40 mmMaximum Velocity500 mm/sec500 mm/secMaximum Acceleration0.3 G0.3 GScale Resoluti..
īװ : Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke300 mm x 4500 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale Resol..
īװ : Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke1,120 mm360 mmMaximum Velocity1,200 mm/sec500 mm/secMaximum Acceleration0.3 G0.3 GScale Resolutio..
īװ : Special Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke770 mm670 mmMaximum Velocity1,500 mm/sec1,500 mm/secMaximum Acceleration1.5 G1.5 GScale Resolutio..
īװ : Profile Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke480 mm450 mmMaximum Velocity800 mm/sec800 mm/secMaximum Acceleration0.5 G0.5 GScale Resolution..
īװ : Gantry Linear Stage
ANT-G Series
Performance SpecificationsAxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke1,200 mm630 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale ..
īװ : Profile Linear Stage
ANT-G Series
Performance SpecificationsAxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke250 mm1100 mmMaximum Velocity1,100 mm/sec1,100 mm/secMaximum Acceleration0.6 G0.6 GScale Re..
īװ : Gantry Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke920 mm760 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale ..
īװ : Gantry Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)StrokeMax. 4,000 mmMax. 1,000 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale Resol..
īװ : Profile Linear Stage
ANT-S Series
Performance SpecificationsStrokeMax. 4,000 mmMaximum Velocity1,000 mm/secMaximum Acceleration0.5 GScale Resolution0.1 ~ 1.0 um / countPosition Accuracy 10 m (Non-Error Mappi..
īװ : Profile Linear Stage