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카테고리 Profile Linear Stage
제목 ANT-G Series

 
 

Performance Specifications

  Axis   X Axis (Bottom)   Y Axis (Upper / Dual)
  Effective Stroke   1,200 mm   630 mm
  Maximum Velocity   1,000 mm/sec   1,000 mm/sec
  Maximum Acceleration   0.5 G   0.5 G
  Scale Resolution   0.5 um / count   0.5 um / count
  Position Accuracy   ± 1.0 µm (After Error Mapping)   ± 1.0 µm (After Error Mapping)
  Position Repeatability   ± 0.5 µm   ± 0.5 µm
  Straightness (Horizontal)               
of Effective Stroke
  ± 3 µm   ± 3 µm
  Straightness (Vertical)                             of Effective Stroke   ± 3 µm   ± 3 µm
  Yawing                                        of Effective Stroke   ± 5 arc-sec   ± 4 arc-sec
  Pitching                                             of Effective Stroke   ± 5 arc-sec   ± 4 arc-sec
  orthogonality   ± 3 arc-sec

 

 

 
 

장비의 안정성과 정도를 높이기 위해 석정반에 리니어 스테이지를 구성한 정밀 스테이지이다.

X축과 Y축의 조합 형태로 구성된 정밀 리니어 스테이지이다.

정속 운전과 정밀한 위치 정밀 제어가 우수하여, 정밀 Vision 검사용 스테이지 구성이 가능하다.


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전체
Profile Linear Stage
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Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 700 mm 40 mm Maximum Velocity 500 mm/sec 500 mm/sec Maximum Acceleration 0.3 G 0.3 G Scale Resoluti..
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ANT-M Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Effective Stroke 300 mm x 4 500 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale Resol..
카테고리 : Special Linear Stage
ANT-M Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Effective Stroke 1,120 mm 360 mm Maximum Velocity 1,200 mm/sec 500 mm/sec Maximum Acceleration 0.3 G 0.3 G Scale Resolutio..
카테고리 : Special Linear Stage
ANT-G Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Effective Stroke 770 mm 670 mm Maximum Velocity 1,500 mm/sec 1,500 mm/sec Maximum Acceleration 1.5 G 1.5 G Scale Resolutio..
카테고리 : Profile Linear Stage
ANT-G Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Effective Stroke 480 mm 450 mm Maximum Velocity 800 mm/sec 800 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale Resolution ..
카테고리 : Gantry Linear Stage
ANT-G Series
Performance Specifications Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 1,200 mm 630 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale ..
카테고리 : Profile Linear Stage
ANT-G Series
Performance Specifications Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 250 mm 1100 mm Maximum Velocity 1,100 mm/sec 1,100 mm/sec Maximum Acceleration 0.6 G 0.6 G Scale Re..
카테고리 : Gantry Linear Stage
ANT-G Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 920 mm 760 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale ..
카테고리 : Gantry Linear Stage
ANT-M Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Stroke Max. 4,000 mm Max. 1,000 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale Resol..
카테고리 : Profile Linear Stage
ANT-S Series
Performance Specifications Stroke Max. 4,000 mm Maximum Velocity 1,000 mm/sec Maximum Acceleration 0.5 G Scale Resolution 0.1 ~ 1.0 um / count Position Accuracy ± 10 탆 (Non-Error Mappi..
카테고리 : Profile Linear Stage