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Ä«Å×°í¸® Gantry Linear Stage
Á¦¸ñ ANT-G Series
 

 

 

Performance Specifications

 

¡¡ Axis ¡¡ X Axis (Bottom) ¡¡ Y Axis (Upper / Dual)
¡¡ Effective Stroke ¡¡ 920 mm ¡¡ 760 mm
¡¡ Maximum Velocity ¡¡ 1,000 mm/sec ¡¡ 1,000 mm/sec
¡¡ Maximum Acceleration ¡¡ 0.5 G ¡¡ 0.5 G
¡¡ Scale Resolution ¡¡ 0.1 ~ 1.0 um / count ¡¡ 0.1 ~ 1.0 um / count
¡¡ Position Accuracy ¡¡ ¡¾ 5 µm (Non-Error Mapping) ¡¡ ¡¾ 5 µm (Non-Error Mapping)
¡¡ Position Repeatability ¡¡ ¡¾ 0.5 µm ¡¡ ¡¾ 0.5 µm
¡¡ Straightness (Horizontal)
of Effective Stroke
¡¡ ¡¾ 3 µm ¡¡ ¡¾ 3 µm
¡¡ Straightness (Vertical)
of Effective Stroke
¡¡ ¡¾ 3 µm ¡¡ ¡¾ 3 µm
¡¡ Yawing                                        of Effective Stroke ¡¡ ¡¾ 7 arc-sec ¡¡ ¡¾ 6 arc-sec
¡¡ Pitching                                             of Effective Stroke ¡¡ ¡¾ 7 arc-sec ¡¡ ¡¾ 6 arc-sec
¡¡ orthogonality ¡¡ ¡¾ 5 arc-sec

 

 
 

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Profile ¸®´Ï¾î ½ºÅ×ÀÌÁöÀÇ Æ¯¼º»ó ´ÜÃàºÎÅÍ ´ÙÃà, ¶Ç´Â Gantry ÇüÅÂÀÇ ±â±¸ ±¸¼ºÀÌ °¡´ÉÇÏ´Ù.

Àåºñ ±¸¼º¿¡ µû¶ó 100 mm ~ 3,000 mmÀÇ Stroke°¡ °¡´ÉÇϸç, Àåºñ Á¤µµ¿¡ µû¶ó ÃÖ´ë 0.1 micronÀÇ ºÐÇØ´ÉÀÌ °¡´ÉÇÏ´Ù.


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