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Ä«Å×°í¸® Special Linear Stage
Á¦¸ñ ANT-M Series


Performance Specifications

 

¡¡ Axis ¡¡ X Axis (Bottom) ¡¡ Y Axis (Upper / Dual)
¡¡ Effective Stroke ¡¡ 700 mm ¡¡ 40 mm
¡¡ Maximum Velocity ¡¡ 500 mm/sec ¡¡ 500 mm/sec
¡¡ Maximum Acceleration ¡¡ 0.3 G ¡¡ 0.3 G
¡¡ Scale Resolution ¡¡ 0.2 um / count ¡¡ 0.2 um / count
¡¡ Position Accuracy ¡¡ ¡¾ 3.0 µm (Non-Error Mapping) ¡¡ ¡¾ 3.0 µm (Non-Error Mapping)
¡¡ Position Repeatability ¡¡ ¡¾ 0.5 µm ¡¡ ¡¾ 0.5 µm
¡¡ Straightness (Horizontal)               
of Effective Stroke
¡¡ ¡¾ 4 µm ¡¡ ¡¾ 2 µm
¡¡ Straightness (Vertical)                           
of Effective Stroke
¡¡ ¡¾ 4 µm ¡¡ ¡¾ 2 µm
¡¡ Yawing                              
of Effective Stroke
¡¡ ¡¾ 3 arc-sec ¡¡ ¡¾ 3 arc-sec
¡¡ Pitching                             
of Effective Stroke
¡¡ ¡¾ 3 arc-sec ¡¡ ¡¾ 3 arc-sec
¡¡ orthogonality ¡¡ ¡¾ 3 arc-sec

 
 
 

 
 
 

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Profile Linear Stage
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Special Linear Stage
ANT-M Series
Performance Specifications ¡¡Axis¡¡X Axis (Bottom)¡¡Y Axis (Upper / Dual)¡¡Effective Stroke¡¡700 mm¡¡40 mm¡¡Maximum Velocity¡¡500 mm/sec¡¡500 mm/sec¡¡Maximum Acceleration¡¡0.3 G¡¡0.3 G¡¡Scale Resoluti..
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Ä«Å×°í¸® : Gantry Linear Stage
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Ä«Å×°í¸® : Gantry Linear Stage
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