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īװ Special Linear Stage
ANT-M Series


Performance Specifications

 

Axis X Axis (Bottom) Y Axis (Upper / Dual)
Effective Stroke 700 mm 40 mm
Maximum Velocity 500 mm/sec 500 mm/sec
Maximum Acceleration 0.3 G 0.3 G
Scale Resolution 0.2 um / count 0.2 um / count
Position Accuracy 3.0 µm (Non-Error Mapping) 3.0 µm (Non-Error Mapping)
Position Repeatability 0.5 µm 0.5 µm
Straightness (Horizontal)               
of Effective Stroke
4 µm 2 µm
Straightness (Vertical)                           
of Effective Stroke
4 µm 2 µm
Yawing                              
of Effective Stroke
3 arc-sec 3 arc-sec
Pitching                             
of Effective Stroke
3 arc-sec 3 arc-sec
orthogonality 3 arc-sec

 
 
 

 
 
 

̱ ݿ Ͼ ̴.

Granite Base Ͽ , Ball Screw ̿ Z ̽ Ͼ ̴.

ġ  Ͽ, Vision ˻ ϴ.


 
 

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Profile Linear Stage
Gantry Linear Stage
Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke700 mm40 mmMaximum Velocity500 mm/sec500 mm/secMaximum Acceleration0.3 G0.3 GScale Resoluti..
īװ : Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke300 mm x 4500 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale Resol..
īװ : Special Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke1,120 mm360 mmMaximum Velocity1,200 mm/sec500 mm/secMaximum Acceleration0.3 G0.3 GScale Resolutio..
īװ : Special Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke770 mm670 mmMaximum Velocity1,500 mm/sec1,500 mm/secMaximum Acceleration1.5 G1.5 GScale Resolutio..
īװ : Profile Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)Effective Stroke480 mm450 mmMaximum Velocity800 mm/sec800 mm/secMaximum Acceleration0.5 G0.5 GScale Resolution..
īװ : Gantry Linear Stage
ANT-G Series
Performance SpecificationsAxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke1,200 mm630 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale ..
īװ : Profile Linear Stage
ANT-G Series
Performance SpecificationsAxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke250 mm1100 mmMaximum Velocity1,100 mm/sec1,100 mm/secMaximum Acceleration0.6 G0.6 GScale Re..
īװ : Gantry Linear Stage
ANT-G Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper / Dual)Effective Stroke920 mm760 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale ..
īװ : Gantry Linear Stage
ANT-M Series
Performance Specifications AxisX Axis (Bottom)Y Axis (Upper)StrokeMax. 4,000 mmMax. 1,000 mmMaximum Velocity1,000 mm/sec1,000 mm/secMaximum Acceleration0.5 G0.5 GScale Resol..
īװ : Profile Linear Stage
ANT-S Series
Performance SpecificationsStrokeMax. 4,000 mmMaximum Velocity1,000 mm/secMaximum Acceleration0.5 GScale Resolution0.1 ~ 1.0 um / countPosition Accuracy 10 m (Non-Error Mappi..
īװ : Profile Linear Stage