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카테고리 Special Linear Stage
제목 ANT-M Series


Performance Specifications

 

  Axis   X Axis (Bottom)   Y Axis (Upper / Dual)
  Effective Stroke   700 mm   40 mm
  Maximum Velocity   500 mm/sec   500 mm/sec
  Maximum Acceleration   0.3 G   0.3 G
  Scale Resolution   0.2 um / count   0.2 um / count
  Position Accuracy   ± 3.0 µm (Non-Error Mapping)   ± 3.0 µm (Non-Error Mapping)
  Position Repeatability   ± 0.5 µm   ± 0.5 µm
  Straightness (Horizontal)               
of Effective Stroke
  ± 4 µm   ± 2 µm
  Straightness (Vertical)                           
of Effective Stroke
  ± 4 µm   ± 2 µm
  Yawing                              
of Effective Stroke
  ± 3 arc-sec   ± 3 arc-sec
  Pitching                             
of Effective Stroke
  ± 3 arc-sec   ± 3 arc-sec
  orthogonality   ± 3 arc-sec

 
 
 

 
 
 

장비의 안정성과 정도를 높이기 위해 석정반에 리니어 스테이지를 구성한 정밀 스테이지이다.

Granite Base로 구성하여 안정성을 높였으며, 정밀 Ball Screw를 이용한 Z축 디바이스로 구성한 리니어 스테이지이다.

정속 운전과 고속 운전의 정밀한 위치 정밀 제어가 우수하여, 정밀 Vision 검사용 스테이지 구성이 가능하다.


 
 

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Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 700 mm 40 mm Maximum Velocity 500 mm/sec 500 mm/sec Maximum Acceleration 0.3 G 0.3 G Scale Resoluti..
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ANT-G Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Effective Stroke 770 mm 670 mm Maximum Velocity 1,500 mm/sec 1,500 mm/sec Maximum Acceleration 1.5 G 1.5 G Scale Resolutio..
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ANT-G Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Effective Stroke 480 mm 450 mm Maximum Velocity 800 mm/sec 800 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale Resolution ..
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ANT-G Series
Performance Specifications Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 1,200 mm 630 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale ..
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ANT-G Series
Performance Specifications Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 250 mm 1100 mm Maximum Velocity 1,100 mm/sec 1,100 mm/sec Maximum Acceleration 0.6 G 0.6 G Scale Re..
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ANT-G Series
Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper / Dual) Effective Stroke 920 mm 760 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale ..
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Performance Specifications  Axis X Axis (Bottom) Y Axis (Upper) Stroke Max. 4,000 mm Max. 1,000 mm Maximum Velocity 1,000 mm/sec 1,000 mm/sec Maximum Acceleration 0.5 G 0.5 G Scale Resol..
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ANT-S Series
Performance Specifications Stroke Max. 4,000 mm Maximum Velocity 1,000 mm/sec Maximum Acceleration 0.5 G Scale Resolution 0.1 ~ 1.0 um / count Position Accuracy ± 10 탆 (Non-Error Mappi..
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